Shilong Zhang
Ph.D. candidate, School of EE, KAIST
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location291 Daehak-ro, Yuseong-gu, Daejeon 34141, Korea
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OfficeSchool of Electrical Engineering (E3-2), 5219
Education
- KAIST, School of Electrical Engineering Ph.D. (M.S. integrated) (Sep. 2023 – Present)
- KAIST, School of Electrical Engineering M.S. (Sep. 2022 – Aug. 2023)
- KAIST, School of Electrical Engineering B.S. (Sep. 2018 – Jun. 2022)
- The Middle School Attached to Sichuan University (Sep. 2015 – Jun. 2018)
Honors
Research Interests
- Machine learning guided computational lithography
Publications
Journal Papers
- Seohyun Kim, Shilong Zhang, and Youngsoo Shin, “ML-guided curvilinear OPC: fast, accurate, and manufacturable curve correction,” IEEE Transactions on Semiconductor Manufacturing, submitted.
- Taeyoung Kim, Shilong Zhang, and Youngsoo Shin, “Model-based OPC with adaptive PID control through reinforcement learning,” IEEE Transactions on Semiconductor Manufacturing, submitted.
Conference Papers
- Minseung Shin, Shilong Zhang, and Youngsoo Shin, “Fast and accurate analysis of power distribution network impedance for DRAM Design,” Proc. Int’l Symp. on Circuits and Systems (ISCAS), accepted.
- Shilong Zhang and Youngsoo Shin, “Unified inverse lithography technology (ILT) and fracturing through recurrent neural network,” Proc. SPIE Advanced Lithography, accepted.
- Shilong Zhang, Seohyun Kim, and Youngsoo Shin, “Fast and accurate matrix-OPC with MEEF prediction using Kolmogorov-Arnold network,” Proc. SPIE Advanced Lithography, accepted.
- Seohyun Kim, Gangmin Cho, Shilong Zhang, and Youngsoo Shin, “Fast and accurate curvilinear OPC with ML-guided curve correction,” Proc. Int’l SoC Design Conf. (ISOCC), Aug. 2024.