TSM Best Paper Award by Yonghwi Kwon and Professor Shin


IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING congratulates Yonghwi Kwon and Youngsoo Shin whose paper Optical Proximity Correction Using Bidirectional Recurrent Neural Network With Attention Mechanism was selected as the Best paper for 2021. The paper was selected from all the papers that appeared in 2021 by a team of Associate Editors. This paper applied recurrent neural networks to optical proximity correction for lithographic processing for integrated circuits.